Equipped with 50+ AFM modes including HybriD mode: all cutting-edge nanomechanical, electrical and magnetic studies are available in basic configuration.

Automated study of samples arrays by user-defined scenario with database image storage.

Up to 200×200 mm and 40 mm in height samples inspection in any point with 1 μm positioning accuracy.

Smart ScanT™ software for one-click optimization of scanning parameters. This is not just an algorithm, it is rather a unique companion that helps a newcomers in AFM to get industry quality images and assists the experts.

Wide possibilities of customization: integration of addition optical equipment, OEM sample holders, automation of measurement and data analysis procedures according to your requirements.

Performance
Automated inspection of large samples and samples arrays with ultimate positioning precision
VEGA is the first AFM that brings industry standard automation to all users:

All routine procedures like area of interest exchange, laser alignment, gentle approach and scanning parameters tuning are fully automated.
Motorized sample positioning stage is correlated with optical image allowing 1 um positioning accuracy on 200×200 mm area.
Prolongated serial measurements of large and multiple samples became easy and time-effective thanks to smart algorithms, user interface for multiple AFM measurements and database image storage.

Perfect environment for high-resolution measurements
High-resolution measurements require exceptional level of acoustic and vibration isolation of AFM working environment. Build-in acoustic enclosure and active anti-vibration system makes VEGA perfect for demanding AFM studies.

Thermal drift is a challenging issue for high-resolution and long-term measurements especially for largesample AFMs with massive mechanical parts. Unique design of build-in fan-free enclosure provides VEGA with capability to operate at conditions of extraordinary temperature stability within 0.05 oC. This guarantees the exceptional low thermal drift of less than 0.2 nm/min.

Customizing
OEM sample holders

VEGA mechanical design allows fast exchange and three-point mount of sample holder. Upon your request we can develop unique:

vacuum wafer chucks;
multiple sample holders;
holders with sample temperature control option;
etc.
Additional optical equipment:

optical microscope with up to 250 nm resolution;
raman spectroscopy;
ellipsometry;
etc.
This equipment can be integrated and correlated with AFM probe position thanks to 1 μm sample XY-positioning accuracy.

Automation of measurement and data analysis procedures

Our software engineers can develop unique automation algorithms according to your requirements.

Most advanced set of AFM modes in basic configuration
HybriD (HD) mode:
Quantitative Nanomechanical Measurements (QNM) – mapping of Young’s modulus and work of adhesion values
Fast Force Volume – recording of force-distance curves for each scanning point
HD Conductive Probe AFM (HD CP-AFM) – non-destructive conductive measurements
HD Piezoresponse Force Microscopy (HD PFM) – non-destructive piezoresponse measurements
HD KPFM, HD SCM, HD EFM – single- and multifrequency electrostatic studies
HD MFM – magnetic studies

Multi-frequency electrical studies:
Single- and two-pass Amplitude and Phase Modulation Kelvin Probe Force Microscopy (KPFM)
Single- and two-pass Amplitude and Phase Modulation Scanning Capacitive Force Microscopy (SCFM)
Single- and two-pass Amplitude and Frequency Modulation Electrostatic Force Microscopy (EFM)

Full list of AFM modes avaliable in basic configuration:
Contact AFM: Topography, Lateral Force, Force Modulation, Spreading Resistance Imaging

Amplitude modulation AFM: Topography, Phase, Feedback

HybriD mode AFM: Topography, Young’s modulus, Work of Adhesion, Viscoelectisity, Current, Piezoresponse Force Microscopy, Fast Force Volume

AFM spectroscopy: Force-distance, Amplitude-distance, Phase-distance, I(V), I(Z)

Magnetic Force Microscopy: Two-pass and Frame Lift DC/AC

Electrostatic Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Frequency Modulation

Scanning Capacitance Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Frequency Modulation (dC/dZ and dC/dV imaging)

Kelvin Probe Force Microscopy: Single-pass and Two-pass Amplitude Modulation, Phase Modulation

Piezoresponse force microscopy & Switching Spectroscopy

Nanolithography: Voltage, Current, Force

Applications

200x200 mm XY motorized stage together with low-noise scanningby-tip system and variety of nique NT‑MDT SI AFM cantilevers allow failure and roughness analysis of large and heavyweight amples with 30 pm vertical esolution. This feature is now available for users of any skills thanks to automated scanning parameters adjustment.