Technical and functional characteristics, quality of equipment

General Requirements:

The lines are built into dustproof cabinets, the modules are mounted on individual frames with built-in control units.

The frames are equipped with roller bearings with clamps.

The frame is a welded structure made of steel rectangular pipes with a protective polymer coating, on which a polypropylene tabletop is mounted, with baths and actuators.

The design and execution of lines of technical processes meets the requirements for equipment installed in a room with cleanliness class 8 ISO GOST R ISO 14644-4-2002 “Required cleanliness classes. Cleanrooms and associated controlled environments. ”


Baths in the modules are installed in the specified sequence on the line.

Baths, except for the deaf, are equipped with drain pipes with valves.

The trapping baths and the flushing bath are equipped with filling pipes, the flushing baths are equipped with a drain from the main bath with a valve, and from a pocket without a valve.

Devices for discharging solutions and washing the water are located under the table top of the modules above the pallet and are connected with a common drain pipe with a regeneration unit, or with a sewage pipeline, except for discharges of organic solvents. Organic solvents are poured into containers. Solutions from the deaf baths are removed either by a pump into the appropriate pipeline, or by removing the bath and discharging it into a container (easily removable baths).

Gulf and drain (using a valve) technological solutions in (from) baths to be done manually. Deaf baths are easily removable.

Deionized water is supplied to the washing baths from the storage tank by a pump located directly in the water treatment section of the deionized water. The pump is controlled from places of consumption of deionized water.

Flushing baths in running water are equipped with a system for adjusting the supply of deionized water from the storage tank.

Drying baths are equipped with registers with nozzles, air and nitrogen are heated by heaters. The sensor is installed in the duct of the heated medium. The heater is made of aluminum alloy, heating is carried out with IR lamps.

The heating system provides constant and uniform heating of the working environment.

Control is exercised from the place of consumption by means of a magnetic valve.

The compliance of the supplied air with the requirements of GOST 18463 shall be ensured.

The heating elements of the baths do not introduce contamination into the process medium; the baths with the heating process medium are equipped with sensors for continuous measurement of the temperature of the working medium.

Control and adjustment of temperature is carried out by microprocessor devices.

The accuracy of maintaining the temperature of the solutions in an adjustable range should be + \ - 10C.

Time control is carried out by microprocessor-based time relays. The relay should indicate the end time of the process and allow the number of processing cycles to be set from 1 to 5, the processing time and provide a signal that the process has finished. The heating time of the reagents from a temperature of 200 ° C to 1000 ° C is 60 minutes.

Nickel plating baths, gilding baths, palladizing baths are equipped with fluoroplastic covers.

Flushing baths are equipped with prolipropylene caps.


The cassettes for the substrates are made of Teflon.

For the line of preliminary chemical preparation of substrates before sputtering, the lines of chemical preparation of substrates before sputtering of resistive and conductive layers, the line for preparing the surface of copper before applying photoresist and before gilding provide a fastening of polycore substrates 1 mm thick in a vertical plane of size (mm):

24x15 in the amount of 80 pieces;

30x24 in the amount of 30 pieces;

20x48 in the amount of 20 pieces;

48x30 in the amount of 30 pieces;

60x48 in the amount of 20 pieces;

Access to linear dimension 0.1 mm.

The substrates are fixed with a dotted touch (the track is not more than 0.5 x 0.5 mm).

The number of cartridges on standard sizes:

24x15 - 10 pieces;

30x24 - 10 pieces;

20x48 - 10 pieces;

48x30 - 10 pieces;

60x48 - 10 pieces;

For the line of etching of resistive layers and the line of etching of conductive layers structurally provided a device in the form of a basket for the location of the substrate in the horizontal plane, size:

24x15 in the amount of 8 pieces;

30x24 in an amount of 3 pieces;

20x48 in the amount of 4 pieces;

48x30 in the amount of 4 pieces;

The number of cartridges on standard sizes:

24x15 - 5 pieces;

30x24 - 5 pieces;

20x48 - 5 pieces;

48x30 - 5 pieces;

60x48 - 5 pieces;

Under the baths are polypropylene trays for collecting solutions in case of emergency leakage.

The lines are equipped with opening transparent screens on the front and transparent stationary side screens. The upper front polycarbonate glass is attached to the line frame by hinges, the lower additional front polycarbonate glass is removable.

In the back of the polypropylene wall of the lines are ventilation grilles and flanges for connecting exhaust ventilation.

The lines are equipped with an automated control system for process parameters (temperature, time).


Performance lines 300 substrates per shift.

Power lines 10 kW.