Device pumping
Part number:
Description
Thermovacuum processing (500...600 оC) at exhaust units with turbomolecular pumps and hydrogen puffing (P=10...2 Pa). High voltage training (Ua=10...60 kV) of interelectrode gaps in sealed-off devices. Pumping with the state-of-the-art magnet electrodischarge pumps (the speed of pumping S=0.5...2.0 l/s, U=4...5 kV, induction 0.2...0.3 T).